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Trichlorosilane Industrial Cycle Fluctuation
TCS is short for SiHCl3. Hydrogen silicon is a key chemical raw material in the front segment of the photovoltaic industry chain. High purity polysilicon silicon materials are prepared by chemical deposition method to obtain polysilicon with disordered crystal faces. Hydrogen silicon is an important raw material of polysilicon and its downstream photovoltaic industry. At the same time, the by-product silicon in the production process also has a good breadth and depth of demand in the fields of silica silica and optical fiber material manufacturing. As an important link in the silicon deep processing industry chain, the development path of the trichlorosilane factory also follows the main line of industrial cycle fluctuation, production technology progress, industrial structure change and so on.
A high purity trichlorosilane differential pressure coupled distillation process, using the high pressure tower top steam as the heat source of the low pressure tower reboiler, realized the energy integration and process optimization. Chemical simulation software PRO/Ⅱ8.1 was used to simulate the design parameters of two columns of high purity trichlorosilane differential pressure coupled distillation process and three columns of high purity trichlorosilane differential pressure coupled distillation process. The results show that the primary yield is 92.0% and the theoretical energy saving is 50.1%. The primary yield of three tower coupled trichlorosilane is 92.0%, and the theoretical energy saving is 66.7%. The technology has been successfully industrialized, which can reduce the actual energy consumption of the distillation unit by 40% ~ 60% on average, and greatly reduce the equipment investment.
