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Mass Fraction Of Trichlorosilane
Even though the principal product of trichlorosilane mass fraction able to achieve the requirement of the general customers 99.00% 99.99%, but due to the application of this product is mainly concentrated in the polysilicon production, my company's customer to product the impurities, appearance, as well as trace elements have higher requirements, such as, appearance is colorless transparent or light yellow liquid, no obvious mechanical impurities, The mass fraction of dichlorodihydrosilicon, boron, phosphorus, aluminum and iron is less than or equal to the specified requirements. As the requirements of polysilicon and downstream products continue to increase, the requirements for impurities and trace elements in trichlorosilane products will be more and more strict.
The production process of trichlorosilane is mostly prepared by reaction of gold-grade silicon metal powder and hydrogen chloride gas in a fluidized bed reactor. Generally using gold grade metal silicon powder, hydrogen chloride gas by the combustion reaction of chlorine and hydrogen gas. Reaction temperature is 300-400 degrees, most of the pressure using micro positive pressure operation. The product composition of fluidized bed is basically trichlorosilane (85%~92%), silicon tetrachloride (8%~15%), and a small amount of light components such as dichlorodihydrogen silicon and polysiloxane and other recombination fractions. According to the design of our company, the quality of trichlorosilane obtained after distillation is 99.00%-99.99%, and the quality of silicon tetrachloride by product is 99.00%-99.90%.
