Electronic Grade Trichlorosilane

Electronic grade trichlorosilane sihc13 is colorless, flammable, corrosive liquid and has a suffocating odor. Hydrolyze rapidly in wet air to produce hydrogen chloride


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Product Details

Electronic grade trichlorosilane sihc13 is colorless, flammable, corrosive liquid and has a suffocating odor. Hydrolyze rapidly in wet air to produce hydrogen chloride: boiling point 31.9 ':. Melting point 126.5 c:. Liquid density 134ukgi resistance: in the air "}", the flammability limit is B.9% - 7U}'u. Flash point - 28. U}. Ti}v according to HCl) 5x 1U ".




Specification



InChIKey

ZDHXKXAHOVTTAH-UHFFFAOYAH

UN number

1295

RTECS

VV5950000

Chemical Formula

SiHCl3

Mole Mass

135.4524 g·mol⁻¹

Exterior

colourless liquid

Density

1.342 g/cm3

Melting Point

-126.6 °C

Boiling Point

31.8 °C

Solubility (water)

Decomposition by water

Vapour Pressure

0.660 bar (20 °C)



Preparation Method

The preparation method is to take industrial grade silicon dichloride as raw material and purify it by rectification. Silicon dichloride is used as a silicon source for chemical vapor deposition in the manufacture of semiconductor chips and other components-


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