Electronic Grade Trichlorosilane
Electronic grade trichlorosilane sihc13 is colorless, flammable, corrosive liquid and has a suffocating odor. Hydrolyze rapidly in wet air to produce hydrogen chloride
Electronic grade trichlorosilane sihc13 is colorless, flammable, corrosive liquid and has a suffocating odor. Hydrolyze rapidly in wet air to produce hydrogen chloride: boiling point 31.9 ':. Melting point 126.5 c:. Liquid density 134ukgi resistance: in the air "}", the flammability limit is B.9% - 7U}'u. Flash point - 28. U}. Ti}v according to HCl) 5x 1U ".
Specification
InChIKey | ZDHXKXAHOVTTAH-UHFFFAOYAH | ||
UN number | 1295 | RTECS | VV5950000 |
Chemical Formula | SiHCl3 | Mole Mass | 135.4524 g·mol⁻¹ |
Exterior | colourless liquid | Density | 1.342 g/cm3 |
Melting Point | -126.6 °C | Boiling Point | 31.8 °C |
Solubility (water) | Decomposition by water | Vapour Pressure | 0.660 bar (20 °C) |
Preparation Method
The preparation method is to take industrial grade silicon dichloride as raw material and purify it by rectification. Silicon dichloride is used as a silicon source for chemical vapor deposition in the manufacture of semiconductor chips and other components-